The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

A. V. Gusel’nikov; A. V. Safronov; A. G. Kurenya; V. E. Arkhipov; S. G. Bolgarin; A. E. Ivanov; A. G. Kvashnin; A. V. Okotrub

doi:10.1134/S0020441218040206

The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

A. V. Gusel’nikov, A. V. Safronov, A. G. Kurenya, V. E. Arkhipov, S. G. Bolgarin, A. E. Ivanov, A. G. Kvashnin, A. V. Okotrub

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.

Original language	English
Pages (from-to)	482-485
Number of pages	4
Journal	Instruments and Experimental Techniques
Volume	61
Issue number	4
DOIs	https://doi.org/10.1134/S0020441218040206
Publication status	Published - 1 Jul 2018

Access to Document

10.1134/S0020441218040206

Cite this

@article{f0e8847103fe4ade8eb3e724254b4759,

title = "The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays",

abstract = "The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.",

author = "Gusel{\textquoteright}nikov, {A. V.} and Safronov, {A. V.} and Kurenya, {A. G.} and Arkhipov, {V. E.} and Bolgarin, {S. G.} and Ivanov, {A. E.} and Kvashnin, {A. G.} and Okotrub, {A. V.}",

year = "2018",

month = jul,

day = "1",

doi = "10.1134/S0020441218040206",

language = "English",

volume = "61",

pages = "482--485",

journal = "Instruments and Experimental Techniques",

issn = "0020-4412",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "4",

}

TY - JOUR

T1 - The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

AU - Gusel’nikov, A. V.

AU - Safronov, A. V.

AU - Kurenya, A. G.

AU - Arkhipov, V. E.

AU - Bolgarin, S. G.

AU - Ivanov, A. E.

AU - Kvashnin, A. G.

AU - Okotrub, A. V.

PY - 2018/7/1

Y1 - 2018/7/1

N2 - The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.

AB - The functional diagram and the automation system of a CVD-reactor for the synthesis of vertically oriented carbon nanotube arrays on silicon substrates are described. The system is intended predominantly for recording the physical parameters of the CVD-reactor in real time, generating the instructions for the operator on the selected synthesis-process flow, on-screen display of the selected parameters, and management of the automatic protection of the reactor units and assemblies against contingencies or unspecified actions of the operator. The structure of the system for data acquisition, visualization of synthesis variables, and the CVD process control that allows the synthesis of vertically oriented carbon nanotube arrays is presented.

UR - http://www.scopus.com/inward/record.url?scp=85051071301&partnerID=8YFLogxK

U2 - 10.1134/S0020441218040206

DO - 10.1134/S0020441218040206

M3 - Article

AN - SCOPUS:85051071301

VL - 61

SP - 482

EP - 485

JO - Instruments and Experimental Techniques

JF - Instruments and Experimental Techniques

SN - 0020-4412

IS - 4

ER -

The Automation of a CVD-Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

Abstract

Access to Document

Other files and links

Fingerprint

Cite this