Original language | English |
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Title of host publication | Surface smoothing of polycrystalline AlN thin films by argon cluster ions |
Subtitle of host publication | 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. |
Place of Publication | Томск |
Pages | 256 |
Number of pages | 1 |
Publication status | Published - 2020 |
Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020):
Николай Геннадьевич Коробейщиков, Иван Владимирович Николаев, Максим Анатольевич Роенко, Павел Викторович Гейдт, В.И. Струнин
Research output: Chapter in Book/Report/Conference proceeding › Article in an anthology › peer-review