| Original language | English |
|---|---|
| Title of host publication | Surface smoothing of polycrystalline AlN thin films by argon cluster ions |
| Subtitle of host publication | 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts. |
| Place of Publication | Томск |
| Pages | 256 |
| Number of pages | 1 |
| Publication status | Published - 2020 |
Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020):
Николай Геннадьевич Коробейщиков, Иван Владимирович Николаев, Максим Анатольевич Роенко, Павел Викторович Гейдт, В.И. Струнин
Research output: Chapter in Book/Report/Conference proceeding › Article in an anthology › Research › peer-review