Surface smoothing of polycrystalline AlN thin films by argon cluster ions: 7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020):

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Original languageEnglish
Title of host publicationSurface smoothing of polycrystalline AlN thin films by argon cluster ions
Subtitle of host publication7th International Congress of Energy Fluxes and Radiation Effects (EFRE 2020): Abstracts.
Place of PublicationТомск
Pages256
Number of pages1
Publication statusPublished - 2020

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