Structural characteristics of diamond-like carbon films synthesized by different methods

Alexander Zolkin, Anna Semerikova, Sergey Chepkasov, Maxim Khomyakov

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

In the present study, the Raman spectra of diamond-like amorphous (a-C) and hydrogenated amorphous (a-C:H) carbon films on silicon obtained using the ion-beam methods and the pulse cathodic arc deposition technique were investigated with the aim of elucidating the relation between the hardness and structure of the films. The hardness of the samples used in the present study was 19-45 GPa. Hydrogenated carbon films were synthesized using END-Hall ion sources and a linear anode layer ion source (LIS) on single-crystal silicon substrates. The gas precursors were CH4 and C3H8, and the rate of the gas flow fed into the ion source was 4.4 to 10 sccm. The ion energies ranged from 150 to 600 eV. a-C films were deposited onto Si substrates using the pulse cathodic arc deposition technique. The films obtained by the pulse arc technique contained elements with an ordered structure. In the films synthesized using low-(150 eV) and high-energy (600 eV) ions beams, an amorphous phase was the major phase. The significant blurriness of the diffraction rings in the electron diffraction patterns due to a large film thickness (180-250 nm) did not allow distinctly observing the signals from the elements with an ordered structure against the background of an amorphous phase.

Original languageEnglish
Title of host publicationHigh Technology
Subtitle of host publicationResearch and Applications 2016 - HTRA-2016
PublisherTrans Tech Publications Ltd
Pages112-117
Number of pages6
Volume743 KEM
ISBN (Print)9783035711356
DOIs
Publication statusPublished - 1 Jan 2017
Event5th International Science and Engineering Conference on High Technology: Research and Applications, HTRA 2016 - Tomsk, Russian Federation
Duration: 5 Dec 20167 Dec 2016

Publication series

NameKey Engineering Materials
Volume743 KEM
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference5th International Science and Engineering Conference on High Technology: Research and Applications, HTRA 2016
CountryRussian Federation
CityTomsk
Period05.12.201607.12.2016

Keywords

  • Diamond-like carbon
  • End-hall source
  • Linear ion source
  • Pulse cathodic arc
  • Raman spectroscopy
  • Transmission electron microscopy

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