Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2

S. B. Erenburg; S. V. Trubina; K. O. Kvashnina; V. N. Kruchinin; V. V. Gritsenko; A. G. Chernikova; A. M. Markeev

doi:10.1134/S1063776118060031

Short-Range Order in Amorphous and Crystalline Ferroelectric Hf_0.5Zr_0.5O₂

S. B. Erenburg, S. V. Trubina, K. O. Kvashnina, V. N. Kruchinin, V. V. Gritsenko, A. G. Chernikova, A. M. Markeev

Department of Physics

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The microstructures of amorphous and polycrystalline ferroelectric Hf_0.5Zr_0.5O₂ films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO₂ and ZrO₂. After rapid thermal annealing, the mixed Hf_0.5Zr_0.5O₂ oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO₂ and ZrO₂. The presence of the HfO₂ and ZrO₂ phases in the Hf_0.5Zr_0.5O₂ films is also detected by ellipsometry.

Original language	English
Pages (from-to)	816-824
Number of pages	9
Journal	Journal of Experimental and Theoretical Physics
Volume	126
Issue number	6
DOIs	https://doi.org/10.1134/S1063776118060031
Publication status	Published - 1 Jun 2018

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title = "Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2",

abstract = "The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.",

author = "Erenburg, {S. B.} and Trubina, {S. V.} and Kvashnina, {K. O.} and Kruchinin, {V. N.} and Gritsenko, {V. V.} and Chernikova, {A. G.} and Markeev, {A. M.}",

year = "2018",

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doi = "10.1134/S1063776118060031",

language = "English",

volume = "126",

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journal = "Journal of Experimental and Theoretical Physics",

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T1 - Short-Range Order in Amorphous and Crystalline Ferroelectric Hf0.5Zr0.5O2

AU - Erenburg, S. B.

AU - Trubina, S. V.

AU - Kvashnina, K. O.

AU - Kruchinin, V. N.

AU - Gritsenko, V. V.

AU - Chernikova, A. G.

AU - Markeev, A. M.

PY - 2018/6/1

Y1 - 2018/6/1

N2 - The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.

AB - The microstructures of amorphous and polycrystalline ferroelectric Hf0.5Zr0.5O2 films are studied by X-ray spectroscopy and ellipsometry. EXAFS spectra demonstrate that the amorphous film consists of an “incompletely mixed” solid solution of metallic oxides HfO2 and ZrO2. After rapid thermal annealing, the mixed Hf0.5Zr0.5O2 oxide films have a more ordered polycrystalline structure, and individual Hf and Zr monoxide islands are formed in the films. These islands are several nanometers in size and have a structure that is similar to the monoclinic structure of HfO2 and ZrO2. The presence of the HfO2 and ZrO2 phases in the Hf0.5Zr0.5O2 films is also detected by ellipsometry.

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JO - Journal of Experimental and Theoretical Physics

JF - Journal of Experimental and Theoretical Physics

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ER -

Short-Range Order in Amorphous and Crystalline Ferroelectric Hf_0.5Zr_0.5O₂

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