Production of nanoscale crystalline materials (Si, SiC) by a highly efficient hyperbaric method

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The method of producing nanopowders of Si and SiC by pyrolysis of a silicon-hydrocarbon mixture by compression in a cyclic process in a flow reactor is proposed and implemented. The obtained powders are characterized by X-ray diffraction and transmission electron microscopy. The new design solutions and use of ceramic coatings obtained by applying microarc oxidation for the piston-cylinder assembly - a compression unit of the reactor - allowed avoiding the use of compression rings and lubricants, achieving a high compression ratio and pressure and temperature in the reactor needed for monosilane pyrolysis. Pyrolysis in the flow reactor is convenient, technological and efficient in terms of its use in the production of high purity nanopowders.

Original languageEnglish
Article number012100
Number of pages5
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 7 Dec 2018
Event3rd All-Russian Scientific Conference Thermophysics and Physical Hydrodynamics with the School for Young Scientists, TPH 2018 - Yalta, Crimea, Ukraine
Duration: 10 Sep 201816 Sep 2018




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