Peculiarities of the AlN crystalline phase formation in a result of the electron-stimulated reconstruction transition (√31×√31)R ± 9° − (1 × 1)

D. S. Milakhin, T. V. Malin, V. G. Mansurov, Yu G. Galitsyn, A. S. Kozhukhov, D. E. Utkin, K. S. Zhuravlev

Research output: Contribution to journalArticlepeer-review

Abstract

In the present work, it was found for the first time that an electron beam used in reflection high-energy electron diffraction technique stimulates a reconstruction transition from a sapphire (√31×√31)R ± 9° superstructure which is chemically inert under an ammonia flux to an unreconstructed (1 × 1) structure with subsequent surface nitridation. The electron beam initiates electron-stimulated oxygen desorption from the sapphire surface followed by formation of oxygen vacancies, which are potential energetically accessible centers for the primary nuclei formation of the AlN crystalline phase.

Original languageEnglish
Article number148548
JournalApplied Surface Science
Volume541
Early online date26 Nov 2020
DOIs
Publication statusPublished - 1 Mar 2021

Keywords

  • (√31×√31)R±9° superstructure
  • Aluminum nitride
  • Ammonia molecular-beam epitaxy
  • Reflection high-energy electron diffraction
  • Sapphire

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