Optical measuring and laser technologies for scientific and industrial applications

Yuri V. Chugui, Alexander G. Verkhoglyad, Petr S. Zavyalov, Evgeny V. Sysoev, Rodion V. Kulikov, Ignat A. Vykhristyuk, Marina A. Zavyalova, Alexander G. Poleshchuk, Victor P. Korolkov

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Modern industry and science require novel 3D optical measuring systems and laser technologies with micrometer/ nanometer resolutions. To solve actual problems, we have developed a family of these optical measuring systems and technologies. An optical system for the 3D inspection of ceramic parts is described. A new approach to the formation of 3D laser templates using diffractive optics is presented for large objects, such as ∼ 30 m antennas. The performance specifications of a 3D super resolution, optical low-coherent micro/nano profilometer are given. Using a perfectly smooth atomic mirror as a reference object, a breakthrough depth measurement with resolution of 20 picometers is achieved. The newest results in the field of laser technologies for the high-precision synthesis of microstructures by an updated laser circular image generator using the semiconductor laser is presented. The measuring systems and the laser image generator have been tested by customers and are used in different branches of industry and science.

Original languageEnglish
Pages (from-to)515-524
Number of pages10
JournalInternational Journal of Automation Technology
Issue number5
Publication statusPublished - 1 Sep 2015


  • 3D optical inspection
  • Diffractive optical element
  • Laser circular image generator
  • Nano profilometer
  • Pico resolution


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