On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

T. D. Akhmetov; A. A. Ivanov; I. V. Shikhovtsev

doi:10.1134/S1063780X21070011

On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

T. D. Akhmetov, A. A. Ivanov, I. V. Shikhovtsev

Research output: Contribution to journal › Article › peer-review

Abstract

In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

Original language	English
Pages (from-to)	732-741
Number of pages	10
Journal	Plasma Physics Reports
Volume	47
Issue number	7
DOIs	https://doi.org/10.1134/S1063780X21070011
Publication status	Published - Jul 2021

Keywords

antenna
magnetostatics
plasma generator
quasi-stationary approximation
shield
solenoid
vortex field

OECD FOS+WOS

1.03 PHYSICAL SCIENCES AND ASTRONOMY

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10.1134/S1063780X21070011

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title = "On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator",

abstract = "In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.",

keywords = "antenna, magnetostatics, plasma generator, quasi-stationary approximation, shield, solenoid, vortex field",

author = "Akhmetov, {T. D.} and Ivanov, {A. A.} and Shikhovtsev, {I. V.}",

note = "Funding Information: The authors are grateful to Dr. V.I. Davydenko for the interest in this work and useful remarks. Publisher Copyright: {\textcopyright} 2021, Pleiades Publishing, Ltd.",

year = "2021",

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doi = "10.1134/S1063780X21070011",

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T1 - On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

AU - Akhmetov, T. D.

AU - Ivanov, A. A.

AU - Shikhovtsev, I. V.

PY - 2021/7

Y1 - 2021/7

N2 - In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

AB - In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

KW - antenna

KW - magnetostatics

KW - plasma generator

KW - quasi-stationary approximation

KW - shield

KW - solenoid

KW - vortex field

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DO - 10.1134/S1063780X21070011

M3 - Article

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SP - 732

EP - 741

JO - Plasma Physics Reports

JF - Plasma Physics Reports

SN - 1063-780X

IS - 7

ER -

On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

Abstract

Keywords

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