On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

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Abstract

In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

Original languageEnglish
Pages (from-to)732-741
Number of pages10
JournalPlasma Physics Reports
Volume47
Issue number7
DOIs
Publication statusPublished - Jul 2021

Keywords

  • antenna
  • magnetostatics
  • plasma generator
  • quasi-stationary approximation
  • shield
  • solenoid
  • vortex field

OECD FOS+WOS

  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

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