Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen

Nikon Demin, Alexander Fedoseev, Gennady Sukhinin, Mikhail Isupov

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

Global model for a low-frequency inductive discharge in pure oxygen is presented. Calculations of all basic plasma parameters were performed in a range of gas pressure of 0.1-10 Pa and a range of discharge power of 100-4000W for a large gas discharge chamber. It was found that plasma electronegativity changes non-monotonously with gas pressure and discharge power with a maximum at gas pressure of 1 Pa and discharge power of 1000 W.

Original languageEnglish
Title of host publicationProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages657-661
Number of pages5
ISBN (Electronic)9781728126869
DOIs
Publication statusPublished - 14 Sep 2020
Event7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duration: 14 Sep 202026 Sep 2020

Publication series

NameProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
CountryRussian Federation
CityVirtual, Tomsk
Period14.09.202026.09.2020

Keywords

  • Ferromagnetic enhanced ICP
  • Global model
  • Large scale plasma processingio
  • Oxygen discharge

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