Novel single-source precursors for SiB:XCyNz film deposition

Ivan S. Merenkov, Boris A. Gostevskii, Pavel O. Krasnov, Tamara V. Basova, Yuri M. Zhukov, Igor A. Kasatkin, Sergey V. Sysoev, Victor I. Kosyakov, Maksim N. Khomyakov, Marina L. Kosinova

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Engineering & Materials Science

Chemical Compounds