Near-field infrared spectroscopy of SiOx nanowires

I. A. Milekhin; A. S. Kozhukhov; D. V. Sheglov; L. I. Fedina; A. G. Milekhin; A. V. Latyshev; D. R.T. Zahn

doi:10.1016/j.apsusc.2022.152583

Near-field infrared spectroscopy of SiO_x nanowires

I. A. Milekhin, A. S. Kozhukhov, D. V. Sheglov, L. I. Fedina, A. G. Milekhin, A. V. Latyshev, D. R.T. Zahn

Research output: Contribution to journal › Article › peer-review

Abstract

Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiO_x nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiO_x with a spatial resolution far below the diffraction limit. The composition × across SiO_x nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

Original language	English
Article number	152583
Journal	Applied Surface Science
Volume	584
DOIs	https://doi.org/10.1016/j.apsusc.2022.152583
Publication status	Published - 15 May 2022

Keywords

Atomic force microscopy
Local anodic oxidation
Near-field infrared spectroscopy
Optical phonons
Silicon oxide nanowire

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY
1.04 CHEMICAL SCIENCES

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10.1016/j.apsusc.2022.152583

Cite this

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title = "Near-field infrared spectroscopy of SiOx nanowires",

abstract = "Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.",

keywords = "Atomic force microscopy, Local anodic oxidation, Near-field infrared spectroscopy, Optical phonons, Silicon oxide nanowire",

author = "Milekhin, {I. A.} and Kozhukhov, {A. S.} and Sheglov, {D. V.} and Fedina, {L. I.} and Milekhin, {A. G.} and Latyshev, {A. V.} and Zahn, {D. R.T.}",

note = "Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",

year = "2022",

month = may,

day = "15",

doi = "10.1016/j.apsusc.2022.152583",

language = "English",

volume = "584",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

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AU - Milekhin, I. A.

AU - Kozhukhov, A. S.

AU - Sheglov, D. V.

AU - Fedina, L. I.

AU - Milekhin, A. G.

AU - Latyshev, A. V.

AU - Zahn, D. R.T.

N1 - Funding Information: The authors gratefully acknowledge financial support from the Volkswagen Foundation, MERGE project (TU Chemnitz), DFG project (Grant No.ZA 146/43-1), DFG project (Grant No. ZA 146/44-1) and the Russian Foundation for Basic Research (project 18-29-20066 MK). AFM LAO growth was carried out by using the equipment of the shared-user facility “Nanostructures” in the ISP Center. Publisher Copyright: © 2022 Elsevier B.V.

PY - 2022/5/15

Y1 - 2022/5/15

N2 - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

AB - Scanning-probe-based patterning methods including local anodic oxidation have been widely used in nanotechnology to form various nanoelectronic device structures. However, so far spectroscopic investigations e.g. to determine the stoichiometry of oxide nanostructures with characteristic sizes below the diffraction limit do not exist. Using near-field infrared spectroscopy, we study the vibrational optical modes in SiOx nanowires with a height (width) of 2.1 nm (350 nm). The nanowires were produced by oxidation employing an atomic force microscope (AFM) on wide Si (1 1 1) terraces. The analysis of the spectroscopic data allows us to determine the composition of SiOx with a spatial resolution far below the diffraction limit. The composition × across SiOx nanowires is found to decrease from 1.6 in the center of the nanowire to 1.4 at its edges.

KW - Atomic force microscopy

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