Investigation of the properties of hydrogenated carbon films (a-C: H) deposited on germanium using a linear anode layer ion source

Alexander Zolkin, Anna Semerikova, Sergey Chepkasov, Maxim Khomyakov

Research output: Contribution to journalArticlepeer-review

Abstract

Hydrogenated carbon films (a-C:H) were deposited on single-crystal Ge with ion beams by means of a linear anode layer ion source at a flow rate of C3H8 of 1.7-4.4 sccm. An intermediate layer formed by the ion beam with an energy of 3 keV increases the adhesion of the coatings to the substrate and increases the hardness of the coatings. The highest hardness obtained with the use of the intermediate layer was 19±1.9 GPa. The transmission of the germanium substrate coated with a single layer of the a-C:H coating reaches 65-67% at wavelengths of 4.5-6 μm.

Original languageEnglish
Pages (from-to)11500-11504
Number of pages5
JournalMaterials Today: Proceedings
Volume4
Issue number11
DOIs
Publication statusPublished - 1 Jan 2017

Keywords

  • a-C:H carbon films
  • adhesion
  • antireflective
  • diamond-like carbon
  • hardness
  • linear anode layer ion source
  • optical properties of a-C:H films
  • Raman spectroscopy
  • ENERGY
  • DIAMOND
  • DLC FILMS

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