@inproceedings{f8da5d1b94774fa3afe863be6222c65d,
title = "Interaction of accelerated argon cluster ions with a silicon dioxide surface",
abstract = "Gas cluster ion beams bring new opportunities for diagnostics and modification of materials surfaces. In this work impact of argon clusters on silicon dioxide has been studied by molecular dynamics simulations and experimentally. We have obtained dependencies of crater size and the SiO2 sputtering yield on cluster size and specific energy. High reactive selectivity of sputtered products has been revealed for a high specific energy of clusters. It can cause modification of the target surface layer composition in case of long time irradiation. Peculiarities of experimental and computational data matching have been discussed.",
keywords = "MOLECULAR-DYNAMICS SIMULATIONS, INTERFACE, YIELDS",
author = "Korobeishchikov, {N. G.} and Stishenko, {P. V.} and Popenko, {Y. A.} and Roenko, {M. A.} and Nikolaev, {I. V.}",
note = "Publisher Copyright: {\textcopyright} 2017 Author(s).; Oil and Gas Engineering, OGE 2017 ; Conference date: 24-04-2017",
year = "2017",
month = aug,
day = "23",
doi = "10.1063/1.4998884",
language = "English",
volume = "1876",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "AV Myshlyavtsev and VA Likholobov and VL Yusha",
booktitle = "Oil and Gas Engineering, OGE 2017",
}