Interaction of accelerated argon cluster ions with a silicon dioxide surface

N. G. Korobeishchikov, P. V. Stishenko, Y. A. Popenko, M. A. Roenko, I. V. Nikolaev

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

1 Citation (Scopus)

Abstract

Gas cluster ion beams bring new opportunities for diagnostics and modification of materials surfaces. In this work impact of argon clusters on silicon dioxide has been studied by molecular dynamics simulations and experimentally. We have obtained dependencies of crater size and the SiO2 sputtering yield on cluster size and specific energy. High reactive selectivity of sputtered products has been revealed for a high specific energy of clusters. It can cause modification of the target surface layer composition in case of long time irradiation. Peculiarities of experimental and computational data matching have been discussed.

Original languageEnglish
Title of host publicationOil and Gas Engineering, OGE 2017
EditorsAV Myshlyavtsev, VA Likholobov, VL Yusha
PublisherAmerican Institute of Physics Inc.
Number of pages8
Volume1876
ISBN (Electronic)9780735415560
DOIs
Publication statusPublished - 23 Aug 2017
EventOil and Gas Engineering, OGE 2017 - Omsk, Russian Federation
Duration: 24 Apr 2017 → …

Publication series

NameAIP Conference Proceedings
PublisherAMER INST PHYSICS
Volume1876
ISSN (Print)0094-243X

Conference

ConferenceOil and Gas Engineering, OGE 2017
Country/TerritoryRussian Federation
CityOmsk
Period24.04.2017 → …

Keywords

  • MOLECULAR-DYNAMICS SIMULATIONS
  • INTERFACE
  • YIELDS

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