Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet

Yu V. Fedoseeva, D. V. Gorodetskiy, A. A. Makarova, I. B. Yudin, N. I. Timoshenko, M. Yu Plotnikov, A. A. Emelyanov, A. K. Rebrov, A. V. Okotrub

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We present a study of structural features of diamond coatings prepared by chemical vapor deposition from a hydrogen/methane mixture activated by a microwave discharge using a high-speed jet to transport the mixture to molybdenum substrates heated up to 525 °C, 690 °C, and 1000 °C. The influence of the substrate temperature on morphology, composition, and structure of diamond coatings are studied by scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge X-ray absorption fine structure. The diamond crystals enlarge in size, their density on the substrate increases, while the quality and the crystal surface purity are enhanced as a result of temperature increase.

Original languageEnglish
Pages (from-to)153-162
Number of pages10
JournalJournal of Structural Chemistry
Volume62
Issue number1
DOIs
Publication statusPublished - Jan 2021

Keywords

  • chemical vapor deposition
  • diamond coatings
  • gas jet method
  • microwave plasma
  • NEXAFS
  • Raman spectroscopy
  • scanning electron microscopy
  • XPS

Fingerprint

Dive into the research topics of 'Influence of the temperature of molybdenum substrates on the structure of diamond coatings obtained by chemical vapor deposition from a high-speed microwave plasma jet'. Together they form a unique fingerprint.

Cite this