Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition

Алексей Иванович Сафонов, Вероника Суляева, Алена Леонидовна Богословцева, Николай Иванович Тимошенко

Research output: Contribution to journalArticlepeer-review

Abstract

The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.
Original languageEnglish
Article number10
Pages (from-to)842-846
Number of pages5
JournalJournal of Applied Mechanics and Technical Physics
Volume59
Issue number5
DOIs
Publication statusPublished - 1 Sep 2018
Externally publishedYes

Keywords

  • catalyst
  • fluoropolymer
  • gas-dynamic flow regime
  • HWCVD
  • thin films

OECD FOS+WOS

  • 2.03 MECHANICAL ENGINEERING
  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY
  • 2.05 MATERIALS ENGINEERING

State classification of scientific and technological information

  • 31 CHEMISTRY

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