High-quality single-crystal diamond-graphite-diamond membranes and devices

V. P. Popov, A. K. Gutakovskii, V. A. Antonov, S. N. Podlesnyi, I. N. Kupriyanov, Yu N. Palyanov, S. V. Rubanov

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Implantation of hydrogen ions into synthetic single-crystal diamonds followed by subsequent high-temperature annealing and anodic etching of implanted crystals was used to obtain structurally perfect 30-nm thick diamond membranes with optically active NV- centres (area up to several tens mm(2)) appropriate for use in integral magnetometers and quantum-informatics optoelectronic circuits.

Original languageEnglish
Pages (from-to)226-237
Number of pages12
JournalInternational journal of nanotechnology
Volume12
Issue number3-4
DOIs
Publication statusPublished - 2015

Keywords

  • implantation of hydrogen ions
  • high-pressure-high-temperature-annealing
  • anodic etching
  • single-crystal diamond-graphite-diamond layers and membranes
  • optically active NV- centres
  • HYDROGEN IMPLANTATION
  • FABRICATION
  • NITROGEN
  • LAYERS

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