Hafnia and alumina stacks as UTBOXs in silicon-on insulator

V. P. Popov, V. A. Antonov, A. K. Gutakovskiy, I. E. Tyschenko, V. I. Vdovin, A. V. Miakonkikh, K. V. Rudenko

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Hafnia and alumina stacks as UTBOXs in silicon-on insulator'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds