Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain.

Петр Алексеевич Сковородко, Р.Г. Шарафутдинов , В.Г. Щукин, В.О. Константинов

    Research output: Contribution to conferencePaperpeer-review

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 2012

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