Original language | English |
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Pages | 193 |
Number of pages | 1 |
Publication status | Published - 2012 |
Gas Dynamic Aspects of Silicon Thin Layers Deposition Using Excitation of Free Jet of Working Gas Mixture by Electron Beam: 28th International Symposium on Rarefied Gas Dynamics. July 09-13, 2012. Zaragoza, Spain. rgd28.es/Book_of_Abstracts.pdf.
Петр Алексеевич Сковородко, Р.Г. Шарафутдинов , В.Г. Щукин, В.О. Константинов
Research output: Contribution to conference › Paper › peer-review