The arrays formation of submicron- and micron-sized SiGe and Ge dielectric particles on the Si and SiO2 surfaces, which occur due to solid-state dewetting, is investigated. The shape of the particles and their spatial distribution turned out to be strongly dependent on the crystallographic Si surface orientation, the amount of deposited Ge and the Ge deposition rate, as well as on the presence of a SiO2 film on the Si surface. Possible applications of various surface morphologies with metasurface properties are discussed.
|Number of pages||3|
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 23 Apr 2020|
|Event||4th International Conference on Metamaterials and Nanophotonics, METANANO 2019 - St. Petersburg, Russian Federation|
Duration: 15 Jul 2019 → 19 Jul 2019