Formation of periodic structure on amorphous silicon films by femtosecond laser pulses

A. V. Dostovalov, A. A. Kuchmizhak, K. A. Bronnikov, E. Mitsai, V. P. Korolkov, S. A. Babin

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

In this paper, we report formation of laser-induced periodic surface structures (LIPSS) on amorphous silicon (a-Si) films of various thickness by their lateral scanning with fs laser pulses shaped to astigmatic Gaussian beam. Diverse LIPSS morphologies with characteristic periods ranging from 150 to 1000 nm were found to form upon variation of scanning speed and laser power.

Original languageEnglish
Title of host publicationProceedings - International Conference Laser Optics 2020, ICLO 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728152332
DOIs
Publication statusPublished - 2 Nov 2020
Event2020 International Conference Laser Optics, ICLO 2020 - St. Petersburg, Russian Federation
Duration: 2 Nov 20206 Nov 2020

Publication series

NameProceedings - International Conference Laser Optics 2020, ICLO 2020

Conference

Conference2020 International Conference Laser Optics, ICLO 2020
CountryRussian Federation
CitySt. Petersburg
Period02.11.202006.11.2020

Keywords

  • amorphous silicon thin film
  • femtosecond laser pulses
  • laser induced periodic surface structures

OECD FOS+WOS

  • 1.03.UH PHYSICS, ATOMIC, MOLECULAR & CHEMICAL
  • 1.03.SY OPTICS

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