Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam

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Abstract

In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.

Original languageEnglish
Article number012162
Number of pages4
JournalJournal of Physics: Conference Series
Volume1382
Issue number1
DOIs
Publication statusPublished - 28 Nov 2019
Event3th Siberian Thermophysical Seminar, STS 2019 - Novosibirsk, Russian Federation
Duration: 27 Aug 201929 Aug 2019

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