Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam

I. V. Nikolaev; N. G. Korobeishchikov; M. A. Roenko

doi:10.1088/1742-6596/1382/1/012162

Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam

I. V. Nikolaev, N. G. Korobeishchikov, M. A. Roenko

Applied Physics Division

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/N_mean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate V_etch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.

Original language	English
Article number	012162
Number of pages	4
Journal	Journal of Physics: Conference Series
Volume	1382
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/1382/1/012162
Publication status	Published - 28 Nov 2019
Event	3th Siberian Thermophysical Seminar, STS 2019 - Novosibirsk, Russian Federation Duration: 27 Aug 2019 → 29 Aug 2019

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title = "Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam",

abstract = "In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.",

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AU - Nikolaev, I. V.

AU - Korobeishchikov, N. G.

AU - Roenko, M. A.

PY - 2019/11/28

Y1 - 2019/11/28

N2 - In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.

AB - In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.

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DO - 10.1088/1742-6596/1382/1/012162

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