In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate Vetch varies between 0.46 and 1.1 nm/min with an incident angle change from 0? to 70?.
|Number of pages||4|
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 28 Nov 2019|
|Event||3th Siberian Thermophysical Seminar, STS 2019 - Novosibirsk, Russian Federation|
Duration: 27 Aug 2019 → 29 Aug 2019