Formation of irregular morphology on nanostructured surface by gas cluster ion beam

Vasiliy Pelenovich, Xiaomei Zeng, Wenbin Zuo, Alexander Tolstogouzov, Nikolay Korobeishchikov, Dejun Fu, Bing Yang

Research output: Contribution to journalArticlepeer-review

Abstract

Ar1000 cluster ion beam was used to fabricate irregular structures of a micrometer scale on the surface of pressed Si powder of 60 nm nanoparticles (NPs). The average density of the target material played an important role in the surface features formation. The samples with lower average density, i.e. with larger distance between adjacent NPs demonstrated more developed surface morphology, which implied an importance of the degree of freedom of NP and its beam induced mobility in formation of the surface features. At higher average density a process of particle erosion was accompanied by the debris formation, which filled the gaps between the NPs, blocked the particle mobility, and, eventually, resulted in conventional smoothing effect.

Original languageEnglish
Article number109705
Number of pages4
JournalVacuum
Volume182
DOIs
Publication statusPublished - 1 Dec 2020

Keywords

  • Gas cluster ion beam
  • Si nanopowder
  • Smoothing effect
  • Surface nanostructures
  • BOMBARDMENT

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