Formation of an ion-cluster beam for material processing

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In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.
Original languageEnglish
Pages (from-to)115-123
Number of pages9
Journal Journal of International Scientific Publications
Issue number2
Publication statusPublished - 2012

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