Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

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Abstract

Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 ).

Original languageEnglish
Pages (from-to)274-277
Number of pages4
JournalTechnical Physics Letters
Volume45
Issue number3
DOIs
Publication statusPublished - 1 Mar 2019

Keywords

  • BEAM
  • SIZE

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