Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam

A. V. Dostovalov, K. A. Bronnikov, D. A. Belousov, V. P. Korolkov, S. A. Babin

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

We present the results of high-ordered periodic surface structure formation by femtosecond laser pulses (λ = 1026 nm, τ = 232 fs) using an astigmatic Gaussian beam with a diameter of ≈100 μm on the surface of metal films (thickness of 15 nm and 150 nm) of Hf sputtered on the glass substrate. Continuous and uniform structures with a period of ≈700 nm are formed at a scanning speed up to 2000 μm/s on the film with a thickness of 15 nm. In addition, the formation of ablative periodic substructures with a period of about 160 nm oriented perpendicularly to the main ones was observed on the oxide protrusions. In the case of 150 nm thick film, defects, cracks and phase shifts accompanied a uniform structure with a period of ≈940 nm formed at a speed up to 500 μm/s.

Original languageEnglish
Title of host publicationAdvanced Laser Processing and Manufacturing III
EditorsRongshi Xiao, Minghui Hong, Jian Liu, Jianhua Yao, Yuji Sano
PublisherSPIE
Number of pages6
ISBN (Electronic)9781510630833
DOIs
Publication statusPublished - 1 Jan 2019
EventAdvanced Laser Processing and Manufacturing III 2019 - Hangzhou, China
Duration: 21 Oct 201922 Oct 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11183
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceAdvanced Laser Processing and Manufacturing III 2019
CountryChina
CityHangzhou
Period21.10.201922.10.2019

Keywords

  • Femtosecond laser nanostructuring
  • Hafnium
  • Laser-induced periodic surface structures
  • Surface modification
  • laser-induced periodic surface structures
  • surface modification
  • femtosecond laser nanostructuring
  • hafnium

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  • Cite this

    Dostovalov, A. V., Bronnikov, K. A., Belousov, D. A., Korolkov, V. P., & Babin, S. A. (2019). Fast formation of hybrid periodic surface structures on Hf thin-film by focused femtosecond laser beam. In R. Xiao, M. Hong, J. Liu, J. Yao, & Y. Sano (Eds.), Advanced Laser Processing and Manufacturing III [111830U] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11183). SPIE. https://doi.org/10.1117/12.2537672