Abstract
MEMS control systems, such as ink-jet printers, optical switches and valves, use the explosive vaporization of metastable liquid for the rapid phase change. The initial stage of explosive vaporization of water and 2-propanol has been studied experimentally using thin-film microheaters, covered with submicron silicon carbide layer and nanostructured tantalum layer. The main objective of this study is to compare the temperature of nucleation and accumulated vapor volume for flat and nanostructured microheaters for the same fluid and temperature growth rate. The multilayer thin-film resistors with the size of 100×110 μm and 60×64 μm were used in the experiments. Applying the optical method based on measuring of the laser beam intensity reflected from resistor surface, the characteristics of the initial stage of explosive vaporization due to pulse heating were obtained. The dependencies of the temperature of explosive boiling-up on temperature growth rate as well as boiling time on effective heat flux were defined for both microheaters.
| Original language | English |
|---|---|
| Pages (from-to) | 6961-6967 |
| Number of pages | 7 |
| Journal | International Heat Transfer Conference |
| Volume | 2018-August |
| DOIs | |
| Publication status | Published - 1 Jan 2018 |
| Event | 16th International Heat Transfer Conference, IHTC 2018 - Beijing, China Duration: 10 Aug 2018 → 15 Aug 2018 |
Keywords
- Boiling
- Explosive vaporization
- MEMS
- Microheater
- Nano/micro
- Pulse heating