Experimental study of accelerated argon ion-cluster beams

N. G. Korobeishchikov, V. V. Kalyada, A. A. Shmakov, G. I. Shul'zhenko

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The formation of accelerated vapor-phase argon beams has been analyzed experimentally with the aim of developing a laboratory bench for ion-cluster modification of materials. Accelerated argon-cluster beams with energies up to 22 keV and intensities up to 6 × 1013 ions/(cm2 s) have been produced at an average size of cluster ions up to 1013 atoms/cluster. The size distributions of ions in an accelerated ion-cluster beam have been investigated by the retarding-potential method at different stagnation pressures. It is shown that the mass composition of an ion-cluster beam depends on the conditions of ion-beam formation.

Original languageEnglish
Pages (from-to)25-28
Number of pages4
JournalTechnical Physics Letters
Volume40
Issue number1
DOIs
Publication statusPublished - Jan 2014

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