The effect of a high-energy electron beam (11 keV) on the (0001) sapphire nitridation process is investigated. The high-energy electrons accelerate more than an order of magnitude the sapphire nitridation process. The effect is due to an increase of the Al and N atom concentrations on the sapphire surface caused by the electron-stimulated desorption of oxygen atoms and electron-stimulated decomposition of ammonia molecules.
- electron-stimulated processes
- reflection high-energy electron diffraction (RHEED)
- reflection high-energy electron diffraction (RH EED)
- AL2O3 SURFACE