Abstract
Abstract: By means of in situ ultrahigh vacuum reflection electron microscopy, the nucleation of vacancy islands on wide terraces of the Si(100) surface is investigated. The temperature dependence of the displacement of a vacancy island nucleation center is determined in the process of heating a sample with a dc electric current. On the basis of a theoretical model, the effective electric charge of addimers is estimated in the direction across dimer rows of the surface. The effective charge has a positive sign and does not exceed 15 units of the elementary charge in the temperature range of 1020–1120°C.
Original language | English |
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Pages (from-to) | 795-799 |
Number of pages | 5 |
Journal | Semiconductors |
Volume | 53 |
Issue number | 6 |
DOIs | |
Publication status | Published - 1 Jun 2019 |
Keywords
- ATOMIC STEPS
- SI(001)
- DIFFUSION
- SI