Electromechanical coupling in suspended nanomechanical resonators with a two-dimensional electron gas

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Abstract

A physical model describing the piezoelectric-effect-mediated influence of bending of a thin suspended cantilever with a two-dimensional electron gas on the conductivity is proposed. The model shows that the conductivity change is almost entirely caused by the rapid change in mechanical stress near the boundary of suspended and non-suspended areas, rather than by the stress itself. An experiment confirming that the electromechanical coupling is associated with the piezoelectric effect is performed. The experimentally measured conductance sensitivity to the cantilever's vibrations agree with the developed physical model.

Original languageEnglish
Article number012043
Number of pages4
JournalJournal of Physics: Conference Series
Volume864
Issue number1
DOIs
Publication statusPublished - 15 Aug 2017

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