Diagnostics of intensive gas cluster-ion beams for materials processing: Proc. of the Russia-Japan Conference “Advanced Materials – 2016: Synthesis, Processing and Properties of Nanostructures”. Oct. 30th – Nov. 3rd, 2016 / Novosibirsk State University. – Novosibirsk. 2016 – p. 101. ISBN 978-5-4437-0570-5

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Pages101
Number of pages1
Publication statusPublished - 2016

Cite this