Diagnostics of argon cluster ion beam for materials treatment

N. G. Korobeishchikov; I. V. Nikolaev; M. A. Roenko

doi:10.1088/1742-6596/1115/3/032016

Diagnostics of argon cluster ion beam for materials treatment

N. G. Korobeishchikov, I. V. Nikolaev, M. A. Roenko

Applied Physics Division

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.

Original language	English
Article number	032016
Number of pages	5
Journal	Journal of Physics: Conference Series
Volume	1115
Issue number	3
DOIs	https://doi.org/10.1088/1742-6596/1115/3/032016
Publication status	Published - 27 Nov 2018
Event	6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018 - Tomsk, Russian Federation Duration: 16 Sep 2018 → 22 Sep 2018

Keywords

SIZE DETERMINATION
ENERGY

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10.1088/1742-6596/1115/3/032016

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title = "Diagnostics of argon cluster ion beam for materials treatment",

abstract = "The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.",

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T1 - Diagnostics of argon cluster ion beam for materials treatment

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

PY - 2018/11/27

Y1 - 2018/11/27

N2 - The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.

AB - The important parameters for materials surface processing by a gas cluster ions are the mass composition, total energy and energy per atom in the cluster, which depends on the ion beam charge state. The purpose of this work is an experimental characterization of argon cluster ion beam, based on an original time-of-flight technique. The mean sizes of the cluster ions obtained from the measured mass spectra are compared with the mean sizes of the primary neutral clusters. By analyzing the mass spectra at different electron ionization current, the average charge state of cluster ion beam is evaluated.

KW - SIZE DETERMINATION

KW - ENERGY

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U2 - 10.1088/1742-6596/1115/3/032016

DO - 10.1088/1742-6596/1115/3/032016

M3 - Conference article

AN - SCOPUS:85058243310

VL - 1115

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

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T2 - 6th International Congress on Energy Fluxes and Radiation Effects 2018, EFRE 2018

Y2 - 16 September 2018 through 22 September 2018

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