Development of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum

A. Semenov, V. Anashin, A. Krasnov

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

It is required an ultra-high vacuum (near 1E-11 Torr in the beam absence mode) in the synchrotron source of 4th generation SFR “SKIF”. Owing to the vacuum chambers have small molecular conductivity and the space limitation for pumps location, compact combined pumps application is required, i.e. pump on the base of non-evaporable getter and sputter ion pump. The modern pumps NEXTorr (SAES Getters, Italy) are not implemented the all of requirements on argon and methane for SFR “SKIF”. Therefore, it is necessary to create similar combined pumps by Russian manufacture. The first theoretical pumping speed calculations for one cell of diode type sputter ion pump and the whole of sputter ion pump are presented here. Also experimental results of pumping speed measurements depending on the magnetic field, diameter and length of cell for sputter ion pump are given.

Original languageEnglish
Title of host publicationSynchrotron and Free Electron Laser Radiation
Subtitle of host publicationGeneration and Application, SFR 2020
EditorsBoris Knyazev, Nikolay Vinokurov
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735440333
DOIs
Publication statusPublished - 17 Nov 2020
Event2020 Internetional Conference on Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020 - Novosibirsk, Russian Federation
Duration: 13 Jul 202016 Jul 2020

Publication series

NameAIP Conference Proceedings
Volume2299
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference2020 Internetional Conference on Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2020
CountryRussian Federation
CityNovosibirsk
Period13.07.202016.07.2020

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