Data on the structure, chemical state of silicon carbide synthesized by adiabatic cyclic compression in a chemical reactor

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Abstract

The data presented in this article relate to the scientific article “Pyrolysis of a mixture of monosilane and alkanes in a compression reactor to produce nanodispersed silicon carbide” [1]. In the above article, a method is proposed for producing nanosized silicon carbide powder by compression in a cyclic process of a chemical reactor. Pyrolysis is initiated in mixtures of monosilane and hydrocarbon with argon. The article also presents the analysis data of the obtained product by X-ray diffraction and electron microscopy.

Original languageEnglish
Article number104868
Number of pages7
JournalData in Brief
Volume28
DOIs
Publication statusPublished - Feb 2020

Keywords

  • Chemical compression reactor
  • Cyclic flowing pyrolysis method
  • Nanoscale crystallites
  • Semiconductive nanomaterials
  • Silicon
  • Silicon carbide
  • Synthesis from gas phase
  • REFINEMENT

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