The paper considers the possibilities of quality control of the conductive surface and detection of objects on it beyond the horizon, as well as microscopy of flat faces of semiconductor products using surface electromagnetic waves (SEWs) of the terahertz (THz) range. The conditions under which such methods of control can be implemented are determined; schemes of devices that implement such measurements are elaborated; estimates of the possibilities of the developed methods for monitoring metal and semiconductor products probed by monochromatic THz radiation in the form of SEWs are given.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 9 Oct 2020|
|Event||22nd Russian National Conference on Non-Destructive Testing and Technical Diagnostics: Transformation of Non-Destructive Testing and Technical Diagnostics in the Era of Digitalization. Society Security in a Changing World, RNCNDTTD 2020 - Moscow, Russian Federation|
Duration: 3 Mar 2020 → 5 Mar 2020