Charge Transport Mechanism and Trap Origin in Methyl-Terminated Organosilicate Glass Low-κ Dielectrics

Timofey V. Perevalov, Andrei A. Gismatulin, Andrei E. Dolbak, Vladimir A. Gritsenko, Elena S. Trofimova, Vladimir A. Pustovarov, Dmitry S. Seregin, Konstantin A. Vorotilov, Mikhail R. Baklanov

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