Characteristics of the Raman spectra of diamond-like carbon films. Influence of methods of synthesis

Alexander Zolkin, Anna Semerikova, Sergey Chepkasov, Maxim Khomyakov

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Hydrogenated carbon films were synthesized on single-crystal silicon substrates by an END-Hall ion source or by a linear anode layer source. The gaseous precursors were CH4 and C3H8. The flow rates ranged from 4.5 to 10 sccm. In films synthesized from ion beams, amorphous phase was most pronounced. Carbon films were deposited onto silicon using pulse cathodic arc technique. In these films ordered-structure elements were identified. Raman spectra of a-C and a-C:H films were investigated with the aim of elucidating the interrelation between the hardness of the films (which reached 18, 20, and 45 GPa) and their microstructure.

Original languageEnglish
Pages (from-to)11480-11485
Number of pages6
JournalMaterials Today: Proceedings
Volume4
Issue number11
DOIs
Publication statusPublished - 1 Jan 2017

Keywords

  • Diamond-like carbon
  • End-Hall source
  • Linear ion source
  • Pulse cathodic arc
  • Raman spectroscopy
  • Transmission electron microscopy
  • end-Hall source
  • diamond-like carbon
  • pulse cathodic arc
  • transmission electron microscopy
  • linear ion source

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