Applications of fs laser radiation for formation of thermochemical lipss on Cr films and fabrication of submicron amplitude gratings

A. V. Dostovalov, V. P. Korolkov, V. S. Terentyev, S. A. Babin

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

The paper presents the results of the formation of thermochemical laser induced periodic surface structure on Cr thin films (40-350 nm) that was sputtered on the glass substrate. The different dependence of TLIPSS formation on processing rate in case of thin (40 nm) and thick (350 nm) is observed.

Original languageEnglish
Title of host publication2017 Progress in Electromagnetics Research Symposium - Spring, PIERS 2017
PublisherElectromagnetics Academy
Pages3768-3770
Number of pages3
VolumePart F134321
ISBN (Electronic)9781509062690
DOIs
Publication statusPublished - 16 Jan 2018
Event2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017 - St. Petersburg, Russian Federation
Duration: 22 May 201725 May 2017

Publication series

NameProgress in Electromagnetics Research Symposium
ISSN (Print)1559-9450
ISSN (Electronic)1931-7360

Conference

Conference2017 Progress In Electromagnetics Research Symposium - Spring, PIERS 2017
CountryRussian Federation
CitySt. Petersburg
Period22.05.201725.05.2017

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