A Study of the Gettering Characteristics of Getter Pumps for Different Gases

V. V. Anashin, A. A. Krasnov, A. M. Semenov

Research output: Contribution to journalArticlepeer-review

Abstract

The gettering characteristics of Ti–Zr–Al getter pumps with internal and external heaters have been measured for Н2 and CO. The results are compared to the measured similar characteristics of an NEX‑Torr D 100-05 combined pump from SAES Getters and a titanium sublimation film at temperatures of 300 and 77 K.

Original languageEnglish
Pages (from-to)893-897
Number of pages5
JournalInstruments and Experimental Techniques
Volume63
Issue number6
DOIs
Publication statusPublished - 1 Dec 2020

OECD FOS+WOS

  • 2.11 OTHER ENGINEERING AND TECHNOLOGIES

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