Формирование интенсивных кластерных пучков аргона для технологических процессов

Translated title of the contribution: High intensity argon cluster beams formation for technological processes

Research output: Contribution to journalArticlepeer-review

Abstract

Modernization of experimental complex LEMPUS-1 was done. Experimental investigations of argon cluster beams formation for ion-cluster surface modification technology were performed. Intensity of cluster beams up to 5*1014 clusters per cm2 per sec with average cluster size about 1300 was obtained. It was found the optimal conditions for cluster beam formation.
Translated title of the contributionHigh intensity argon cluster beams formation for technological processes
Original languageRussian
Article number10
Pages (from-to)85-92
Number of pages8
JournalВестник Новосибирского государственного университета. Серия: Физика
Volume7
Issue number1
Publication statusPublished - 2012

OECD FOS+WOS

  • 2.02 ELECTRICAL ENG, ELECTRONIC ENG
  • 1.02 COMPUTER AND INFORMATION SCIENCES
  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

State classification of scientific and technological information

  • 29 PHYSICS

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