Modernization of experimental complex LEMPUS-1 was done. Experimental investigations of argon cluster beams formation for ion-cluster surface modification technology were performed. Intensity of cluster beams up to 5*1014 clusters per cm2 per sec with average cluster size about 1300 was obtained. It was found the optimal conditions for cluster beam formation.
|Translated title of the contribution||High intensity argon cluster beams formation for technological processes|
|Number of pages||8|
|Journal||Вестник Новосибирского государственного университета. Серия: Физика|
|Publication status||Published - 2012|
State classification of scientific and technological information
- 29 PHYSICS