Финишная обработка поверхности монокристаллов титанил-фосфата калия кластерными ионами аргона

Translated title of the contribution: Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions

Research output: Contribution to journalArticlepeer-review

Abstract

It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 )
Translated title of the contributionFinishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions
Original languageRussian
Pages (from-to)30-32
Number of pages3
JournalПисьма в Журнал технической физики
Volume45
Issue number6
DOIs
Publication statusPublished - 2019

State classification of scientific and technological information

  • 29 PHYSICS

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