Abstract
It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm –1 )
Translated title of the contribution | Finishing Surface Treatment of Potassium Titanyl Phosphate Single Crystals by Argon Cluster Ions |
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Original language | Russian |
Pages (from-to) | 30-32 |
Number of pages | 3 |
Journal | Письма в Журнал технической физики |
Volume | 45 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2019 |
OECD FOS+WOS
- 1.03 PHYSICAL SCIENCES AND ASTRONOMY
State classification of scientific and technological information
- 29 PHYSICS