Реализация терагерцовых фильтров высоких частот на основе цельнометаллических микроструктур с использованием глубокой рентгенолитографии

Translated title of the contribution: Implementation of terahertz high-pass filters based on all-metal microsrtuctures using deep x-ray lithography

А.Н. Генцелев, Сергей Александрович Кузнецов, Федор Николаевич Дульцев, Борис Григорьевич Гольденберг, А.Г. Зелинский, В.И. Кондратьев, Дарья Сергеевна Таныгина

Research output: Contribution to journalArticlepeer-review

Abstract

A technique for designing high-pass terahertz quasioptical filters based on thick (up to 1 mm in thickness) self-supporting copper microstructures of subwave topology. The technique is based on the X-ray lithographic formation of a high-aspect resistive mask made of the SU-8 X-ray resist on a silicon substrate with the use of a tungsten X-ray pattern and subsequent galvanic growing of a copper layer through the resistive mask. The example of a 212-m thick structure with a cutoff frequency of 0.42 THz having the topology of hexagonally packed hex-shaped holes is described. The results of the broadband THz characterization of the structure obtained and its electrodynamic analysis are presented
Translated title of the contributionImplementation of terahertz high-pass filters based on all-metal microsrtuctures using deep x-ray lithography
Original languageRussian
Article number2
Pages (from-to)14-27
Number of pages14
JournalАвтометрия
Volume55
Issue number2
DOIs
Publication statusPublished - 2019

State classification of scientific and technological information

  • 29 PHYSICS

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