Overview of Integrated Optical Sensors Based on Silicon: Forecasts and Results of the Decade

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Silicon photonics is the most important technological platform for creating a variety of functional optical elements, including promising types of optical sensors. Moreover, in recent years, 20% of all publications on silicon photonics are devoted to the development of various versions of optical sensors. Their advantage steams from the combination of high technical parameters with the possibility of mass production using CMOS technology of microelectronics and nanophotonics. A brief description of various technological solutions of the last decade that provide progress in the development of optical sensor characteristics is given. Special attention is paid to new promising sensor designs based on bimodal technology, which promises a significant increase in sensor sensitivity by means of equalizing the group delay of a pair of different optical modes propagating through the waveguide structure. The review will be useful for domestic and foreign researchers working in the field of sensor development.

Translated title of the contributionОбзор интегрально-оптических сенсоров на кремнии - прогнозы и итоги десятилетия [приглашённая статья]
Original languageEnglish
Article number13
Pages (from-to)412-430
Number of pages19
JournalOptoelectronics, Instrumentation and Data Processing
Issue number4
Publication statusPublished - Jul 2020


  • channel waveguide
  • grating coupling element
  • optical resonator
  • optical sensor
  • photonic crystal
  • silicon-on-insulator
  • slot waveguide
  • subwavelength grating
  • Vernier effect



State classification of scientific and technological information

  • 29.31 Optics


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