A microscope image processing method for analyzing tlipss structures

Dmitrij Aleksandrovich Belousov, Alexander Vladimirovich Dostovalov, Victor Pavlovich Korolkov, Sergey Lvovich Mikerin

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

Translated title of the contributionМетод обработки микроизображений для анализа структур ТЛИППС
Original languageEnglish
Pages (from-to)936-945
Number of pages10
JournalComputer Optics
Issue number6
Publication statusPublished - 1 Jan 2019


  • Digital image processing
  • Laser materials processing
  • Laser-induced periodic surface structures
  • Microscope image processing
  • digital image processing
  • laser-induced periodic surface structures
  • microscope image processing
  • laser materials processing


  • 1.03.SY OPTICS

State classification of scientific and technological information

  • 29 PHYSICS


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