A microscope image processing method for analyzing tlipss structures

Dmitrij Aleksandrovich Belousov, Alexander Vladimirovich Dostovalov, Victor Pavlovich Korolkov, Sergey Lvovich Mikerin

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.

Translated title of the contributionМетод обработки микроизображений для анализа структур ТЛИППС
Original languageEnglish
Pages (from-to)936-945
Number of pages10
JournalComputer Optics
Volume43
Issue number6
DOIs
Publication statusPublished - 1 Jan 2019

Keywords

  • Digital image processing
  • Laser materials processing
  • Laser-induced periodic surface structures
  • Microscope image processing
  • digital image processing
  • laser-induced periodic surface structures
  • microscope image processing
  • FILMS
  • laser materials processing

OECD FOS+WOS

  • 1.03.SY OPTICS

State classification of scientific and technological information

  • 29 PHYSICS

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