Research output

Research output per year 2016 2021

• 3 Article
• 1 Article in an anthology
• 1 Conference contribution
• 1 Conference article

Research output per year

Research output per year

Search results

• 2020

  Aluminium nitride thin films surface smoothing by argon cluster ions

  Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sep 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

  • Aluminum nitride
  • Argon
  • Thin films
  • Atoms
  • Ions