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2020
Aluminium nitride thin films surface smoothing by argon cluster ions
Korobeishchikov, N., Geydt, P., Nikolaev, I., Strunin, V. & Roenko, M., 14 Sep 2020, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., p. 722-725 4 p. 9242187. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review